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About this Materials Science article
Effects of deposition conditions on physical properties and stresses of Pt and (Al, Si)Ox thin films by Jae-Suk Lee; Jong-Wan Park; Joon-Shik Park; Hyo-Derk Park; Sang-Mo Shin is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Jae-Suk Lee; Jong-Wan Park; Joon-Shik Park; Hyo-Derk Park; Sang-Mo Shin
- Publisher
- Springer; Springer-Verlag; Chapman & Hall; Springer Science and Business Media LLC (ISSN 0261-8028)
- Published
- 1997
- Field
- Materials Science (Physical Sciences)
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