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About this Engineering article

Hydrogen effect on solid phase epitaxy of Si on Si (0 0 1) surface by Masataka Hasegawa; Yasunori Tanaka; Naoto Kobayashi is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Masataka Hasegawa; Yasunori Tanaka; Naoto Kobayashi
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
Published
1998
Language
EN
Field
Engineering (Physical Sciences)

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