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About this Engineering article
Reduced Perssure-Chemical Vapor Deposition of High Quality Ge Layers on SiGe/Si Superlayers for Microelectronics and Optoelectronics Purposes by Chen Da; Xue Zhongying; Liu Su; Miao Zhang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Chen Da; Xue Zhongying; Liu Su; Miao Zhang
- Publisher
- The Electrochemical Society (ISSN 2151-2043)
- Published
- 2012
- Language
- EN
- Field
- Engineering (Physical Sciences)
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