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About this Engineering article
Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz by Águas, H.; Raniero, L.; Pereira, L.; Fortunato, E.; Cabarrocas, P. Roca i; Martins, R. is a Engineering article available to read on EtoBox.
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- Author
- Águas, H.; Raniero, L.; Pereira, L.; Fortunato, E.; Cabarrocas, P. Roca i; Martins, R.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2003
- Field
- Engineering (Physical Sciences)