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About this Engineering article
Deposition of carbon nitride thin films in a hybrid r.f.-PLD technique by T. Klotzbücher; M. Scherge; M. Mergens; D.A. Wesner; E.W. Kreutz is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- T. Klotzbücher; M. Scherge; M. Mergens; D.A. Wesner; E.W. Kreutz
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)
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