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About this Engineering article
Modeling and Estimation of the Parameters of the Morphology of the Surfaces of Thin Films of Nano- and Micro-electromechanical Systems by V. A. Vasiliev, P. S. Chernov is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- V. A. Vasiliev, P. S. Chernov
- Publisher
- Springer US; Springer-Verlag; Springer New York LLC; Springer Science and Business Media LLC (ISSN 0543-1972)
- Published
- 2013
- Field
- Engineering (Physical Sciences)