About this scholarly article

Proceedings of the 6th International Conference on Properties and Applications of Dielectric Materials (Cat. No.00CH36347) - Study on an effect of nitrogenation on microstructure properties of hydrogenated amorphous carbon films by Rong Xingfu, ; Qin Zhiyu, is a scholarly article available to read on EtoBox.

Author

Rong Xingfu, ; Qin Zhiyu,

Publisher

IEEE

Published

2000