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About this Engineering article
Time evolution of ion fluxes incident at the substrate plane during reactive high-power impulse magnetron sputtering of groups IVb and VIb transition metals in Ar/N 2 by Greczynski, Grzegorz; Zhirkov, Igor; Petrov, Ivan; Greene, J. E.; Rosen, Johanna is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Greczynski, Grzegorz; Zhirkov, Igor; Petrov, Ivan; Greene, J. E.; Rosen, Johanna
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2018
- Language
- EN
- Field
- Engineering (Physical Sciences)
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