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About this scholarly article
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Three-dimensional microstructures fabricated by multi-step electrochemical etching of aluminum sheet by Kim, Y.; Youn, S.; Han, W.; Cho, Y.-H.; Park, H.; Chang, B.; Oh, Y. is a scholarly article available to read on EtoBox.
- Author
- Kim, Y.; Youn, S.; Han, W.; Cho, Y.-H.; Park, H.; Chang, B.; Oh, Y.
- Publisher
- IEEE
- Published
- 2009
- Language
- EN
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