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Micromachining Techniques for Fabrication of Micro and Nano Structures by Kahrizi M. (Ed.) is a nonfiction available to read on EtoBox.

What is Micromachining Techniques for Fabrication of Micro and Nano Structures about?

Rijeka: InTech, 2012 - 300 p. – ISBN: 978-953-307-906-6 Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry. Preface Focused Ion Beam Based Three-Dimensional Nano-Machining Miniature Engineered Ta

Who reads Micromachining Techniques for Fabrication of Micro and Nano Structures?

Author

Kahrizi M. (Ed.)

Publisher

INTECH Open Access Publisher

Published

2011

Language

EN

ISBN

9789535160106

Category

nonfiction

Subjects

Engineering, Mechanical Engineering & Dynamics, Stem