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About this Engineering article
Design Assessments of a Refined DC Magnetron Sputter With Multiple Magnetron Arrangements by Cheng-Tsung Liu; Ming-Chih Lai; Chang-Chou Hwang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Cheng-Tsung Liu; Ming-Chih Lai; Chang-Chou Hwang
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9464)
- Published
- 2010
- Field
- Engineering (Physical Sciences)
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