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About this Engineering article
Interest of Pulsed and Modulated dc Discharges for Depositing Insulating Compounds by Reactive Magnetron Sputtering by Billard, A.; Frantz, C. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Billard, A.; Frantz, C.
- Publisher
- EDP Sciences; Les Editions de physique (ISSN 1155-4320)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)