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SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Patterning of magnetron sputtered SmCo films by excimer laser ablation by Wang, Yun H.; Ghantasala, Muralihar K.; Sood, Dinesh K.; Harvey, Erol C.; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro is a scholarly article available to read on EtoBox.

Author
Wang, Yun H.; Ghantasala, Muralihar K.; Sood, Dinesh K.; Harvey, Erol C.; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro
Publisher
SPIE
Published
2002
Language
EN

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