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About this scholarly article
Low Pressure CVD Growth of AlxTi1-xN Films with Tetrakis- (Dimethylamido)Titanium (Tdmat) and Dimethyl Aluminum Hydride (DMAH) Precursors by Sun, Y.-M.; Endle, J.; Ekerdt, J. G.; Russell, N. M.; Healy, M. D.; White, J. M. is a scholarly article available to read on EtoBox.
- Author
- Sun, Y.-M.; Endle, J.; Ekerdt, J. G.; Russell, N. M.; Healy, M. D.; White, J. M.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1997
- Language
- EN
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