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Effects of nitrogen content on microstructures and mechanical behavior of (TiTaCrMoNb)Nx films 1 1 Introduction 1 2 Experimental 2 2.1 Film preparation 2 2.2 Film characterizations and measurements 2 3 Results 2 3.1 Deposition rate and chemical composition 2 3.2 Microstructure and phase formation analysis 3 3.3 Mechanical properties 4 3.4 Tribological properties 5 4 Discussions 6 4.1 The influence of the N content on microstructure and phase formation 6 4.2 The influence of the N content on mechanical properties 7 4.3 The influence of the N content on tribological properties 8 5 Conclusions 8 CRediT authorship contribution statement 8 Declaration of competing interest 8 Data availability 8 Acknowledgments 8 References 8
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- Language
- EN
- Category
- nonfiction
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