Opening book details…
About this Engineering article
Nano Step Height Measurement Using an Optical Method by Wu, Junjie; Ding, Guoqing; Chen, Xin; Han, Tao; Cai, Xiaoyu; Lei, Lihua; Wei, Jiasi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Wu, Junjie; Ding, Guoqing; Chen, Xin; Han, Tao; Cai, Xiaoyu; Lei, Lihua; Wei, Jiasi
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)
- Published
- 2017
- Language
- EN
- Field
- Engineering (Physical Sciences)