About this scholarly article

IEEE International Integrated Reliability Workshop Final Report, 2002. - Conducting atomic force microscopy studies for reliability evaluation of ultrathin SiO/sub 2/ films by Benstetter, G.; Frammelsberger, W.; Schweinboeck, T.; Stamp, R.J.; Kiely, J. is a scholarly article available to read on EtoBox.

Author

Benstetter, G.; Frammelsberger, W.; Schweinboeck, T.; Stamp, R.J.; Kiely, J.

Publisher

IEEE

Published

2002