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About this Engineering article
Reactive ion etching of AlSiCu alloy films : Stephen M. Pearson, Michael A. Wilders and Andrew A. Chambers. Semiconductor int., 97 (February 1987) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 1987
- Field
- Engineering (Physical Sciences)