About this scholarly article

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Design for Manufacturability through Design-Process Integration V - Accurately predicting copper interconnect topographies in foundry design for manufacturability flows by Lu, Daniel; Rieger, Michael L.; Fan, Zhong; Tak, Ki Duk; Chang, Li-Fu; Zou, Elain; Jiang, Jenny; Yang, Josh; Zhuang, Linda; Chen, Kuang Han; Hurat, Philippe; Ding, Hua is a scholarly article available to read on EtoBox.

Author

Lu, Daniel; Rieger, Michael L.; Fan, Zhong; Tak, Ki Duk; Chang, Li-Fu; Zou, Elain; Jiang, Jenny; Yang, Josh; Zhuang, Linda; Chen, Kuang Han; Hurat, Philippe; Ding, Hua

Publisher

SPIE

Published

2011

Language

EN