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About this Engineering article
The Influence of Deposition Conditions on Structure and Morphology of Aluminum Nitride Films Deposited by Radio Frequency Reactive Sputtering by Hao Cheng; Yong Sun; Peter Hing is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Hao Cheng; Yong Sun; Peter Hing
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2003
- Language
- EN
- Field
- Engineering (Physical Sciences)