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About this Materials Science article
Structural variation of thin films deposited from Zn3In2O6 target by RF-sputtering by T. Ushiro; D. Tsuji; A. Fukushima; T. Moriga; I. Nakabayashi; K. Murayama; K. Tominaga is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- T. Ushiro; D. Tsuji; A. Fukushima; T. Moriga; I. Nakabayashi; K. Murayama; K. Tominaga
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0025-5408)
- Published
- 2001
- Language
- EN
- Field
- Materials Science (Physical Sciences)