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About this Engineering article
Impact of transmission non-uniformity of a wrinkled EUV pellicle for N5 patterning under various illuminations by Kim, In-Seon; Kim, Guk-Jin; Yeung, Michael; Barouch, Eytan; Oh, Hye-Keun is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kim, In-Seon; Kim, Guk-Jin; Yeung, Michael; Barouch, Eytan; Oh, Hye-Keun
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2017
- Field
- Engineering (Physical Sciences)
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