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About this Materials Science article
High Quality Silicon-Based AlN Thin Films for MEMS Application by Yu, Yi; Ren, Tian-Ling; Liu, Li-Tian is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Yu, Yi; Ren, Tian-Ling; Liu, Li-Tian
- Publisher
- Taylor and Francis Group; Informa UK (Taylor & Francis); Gordon and Breach Science Publishers; Informa UK Limited (ISSN 1058-4587)
- Published
- 2005
- Field
- Materials Science (Physical Sciences)