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About this Engineering article

Control of a Two-Axis Micromanipulator-Based Scanning Probe System for 2.5-D Nanometrology by Jayanth, G.R.; Chia-Hsiang Menq is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Jayanth, G.R.; Chia-Hsiang Menq
Publisher
IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1083-4435)
Published
2010
Language
EN
Field
Engineering (Physical Sciences)

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