About this scholarly article

Characteristics of Ruthenium Films Prepared by Chemical Vapor Deposition Using Bis(ethylcyclopentadienyl)ruthenium Precursor by Matsui, Yuichi; Hiratani, Masahiko; Nabatame, Toshihide; Shimamoto, Yasuhiro; Kimura, Shinichiro is a scholarly article available to read on EtoBox.

Author

Matsui, Yuichi; Hiratani, Masahiko; Nabatame, Toshihide; Shimamoto, Yasuhiro; Kimura, Shinichiro

Publisher

The Electrochemical Society; Electrochemical Society, Inc. (ISSN 1099-0062)

Published

2002