About this scholarly article

Polymeric Materials for Microelectronic Applications Volume 579 (Science and Technology) by Ito, Hiroshi; Tagawa, Seiichi; Horie, Kazuyuki is a scholarly article available to read on EtoBox.

Author

Ito, Hiroshi; Tagawa, Seiichi; Horie, Kazuyuki

Publisher

American Chemical Society

Published

1995