About this scholarly article

Nucleation and Grain Growth in Silicon Films Deposited by Thermal Decomposition of Disilane by Voutsas, A.T.; Hatalis, M.K. is a scholarly article available to read on EtoBox.

Author

Voutsas, A.T.; Hatalis, M.K.

Publisher

Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)

Published

1993