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About this Engineering article
The Challenge of Measuring Strain in FDSOI Device Structures – HRXRD as a Potential Method of Resolution by Geisler, Holm; Weisheit, Martin; Hofmann, Petra; Engelmann, Hans-Juergen is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Geisler, Holm; Weisheit, Martin; Hofmann, Petra; Engelmann, Hans-Juergen
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Ltd.; Wiley (ISSN 1438-1656)
- Published
- 2017
- Field
- Engineering (Physical Sciences)
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