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About this Engineering article
Planarization Specification for 22nm and Beyond BEOL CMP by Choi, Jihong; Wang, Changan; Wei, Yayi; Zielinski, Eden; Tseng, Wei-tsu; Moon, Yongsik; Kelling, Mark; Economikos, Laertis is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Choi, Jihong; Wang, Changan; Wei, Yayi; Zielinski, Eden; Tseng, Wei-tsu; Moon, Yongsik; Kelling, Mark; Economikos, Laertis
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2010
- Field
- Engineering (Physical Sciences)