About this scholarly article

SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Improved thermal stability of sputtered W/C multilayer thin films by Gonzalez-Hernandez, Jesus; Chao, Benjamin S.; Chan, A. R.; Gavulic, J. M.; Ovshinsky, Stanford R.; Wood, James L.; Hoover, Richard B.; Walker II, Arthur B. C. is a scholarly article available to read on EtoBox.

Author

Gonzalez-Hernandez, Jesus; Chao, Benjamin S.; Chan, A. R.; Gavulic, J. M.; Ovshinsky, Stanford R.; Wood, James L.; Hoover, Richard B.; Walker II, Arthur B. C.

Publisher

SPIE

Published

1993