Opening book details…
About this Engineering article
Cu Metallization Using a Permanent Magnet Electron Cyclotron Resonance Microwave Plasma/sputtering Hybrid System by S. M. Gorbatkin is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- S. M. Gorbatkin
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)