About this document
04 INTERCONNECT DRs S26 by Abd El Aziz Mohamed is a document available to read on EtoBox.
The document discusses the performance of digital ASICs, emphasizing the importance of interconnect technology, including metallic interconnects and dielectric materials, in achieving high-speed operation. It highlights the advantages of copper over aluminum in terms of resistivity and capacitance, while also addressing challenges such as copper diffusion and the need for diffusion barriers. Additionally, it outlines the back-end-of-line (BEOL) process and various methods for metal deposition, including sub
- Author
- Abd El Aziz Mohamed
- Language
- EN