About this scholarly article

SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Lasers as Tools for Manufacturing of Durable Goods and Microelectronics - Kinetics and microstructure of laser chemical vapor deposition of titanium nitride by Egland, Kieth M.; Mazumder, Jyotirmoy; Dubowski, Jan J.; Mazumder, Jyotirmoy; Migliore, Leonard R.; Roychoudhuri, Chandrasekhar; Schaeffer, Ronald D. is a scholarly article available to read on EtoBox.

Author

Egland, Kieth M.; Mazumder, Jyotirmoy; Dubowski, Jan J.; Mazumder, Jyotirmoy; Migliore, Leonard R.; Roychoudhuri, Chandrasekhar; Schaeffer, Ronald D.

Publisher

SPIE

Published

1996

Language

EN