About this document
Microwave Plasma Modeling in COMSOL by Seren Elif Kızışar is a document available to read on EtoBox.
This document discusses modeling microwave plasma processes using COMSOL Multiphysics. Two approaches are compared - one where plasma density directly depends on electric field, and another solving plasma density and temperature conservation equations. The methodology mixes predictive simulations with experimental validation when data is lacking. Models for hydrogen and nitrogen plasmas are presented and will be fitted to experimental results.
- Author
- Seren Elif Kızışar
- Language
- EN