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About this scholarly article
Arsenic Redistribution during Rapid Thermal Chemical Vapor Deposition of TiSi[sub 2] on Si by Fang, Hua; Öztürk, Mehmet C.; O’Neil, Patricia A.; Seebauer, E. G. is a scholarly article available to read on EtoBox.
- Author
- Fang, Hua; Öztürk, Mehmet C.; O’Neil, Patricia A.; Seebauer, E. G.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 2001
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