About this scholarly article

SPIE Proceedings [SPIE Optical Systems Design - Glasgow, Scotland, United Kingdom (Monday 1 September 2008)] Advances in Optical Thin Films III - Low-loss HR coatings on fused silica substrates for 193 nm micro-lithography applications by Laux, Sven; Kaiser, Norbert; Lequime, Michel; Bernitzki, Helmut; Fasold, Dieter; Macleod, H. Angus; Klaus, Michael; Schuhmann, Uwe is a scholarly article available to read on EtoBox.

Author

Laux, Sven; Kaiser, Norbert; Lequime, Michel; Bernitzki, Helmut; Fasold, Dieter; Macleod, H. Angus; Klaus, Michael; Schuhmann, Uwe

Publisher

SPIE

Published

2008

Language

EN