Opening book details…
About this Engineering article
The Role of Gas-Phase Reactions during Chemical Vapor Deposition of Copper from (hfac)Cu(tmvs) by Chae, Y. K. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Chae, Y. K.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)