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CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on Lasers and Electro-Optics (IEEE Cat. No.03TH8671) - Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition by Chun-Hung Lin, ; Ching-Ting Lee, is a scholarly article available to read on EtoBox.

Author
Chun-Hung Lin, ; Ching-Ting Lee,
Publisher
IEEE
Published
2003
Language
EN

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