About this scholarly article

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Analysis, and optimization of a CMOS vertical thermal actuator by Mohamed, A.; Elsimar, H.; Ismail, M. is a scholarly article available to read on EtoBox.

Author

Mohamed, A.; Elsimar, H.; Ismail, M.

Publisher

IEEE

Published

2003

Language

EN