About this scholarly article

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Force-balanced accelerometer with mG resolution, fabricated using Silicon Fusion Bonding and Deep Reactive Ion Etching by van Drieenhuizen, B.P.; Maluf, N.I.; Opris, I.E.; Kovacs, G.T.A. is a scholarly article available to read on EtoBox.

Author

van Drieenhuizen, B.P.; Maluf, N.I.; Opris, I.E.; Kovacs, G.T.A.

Publisher

IEEE

Published

1997

Language

EN