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About this Engineering article
Towards a Versatile DRIE: Silicon Pit Structures Combined With Electrochemical Etch Stop by P. Kurzawski; T. Salo; H. Baltes; A. Hierlemann is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- P. Kurzawski; T. Salo; H. Baltes; A. Hierlemann
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1057-7157)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)
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