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Can I read Ultra-stable, High-temperature Pressure Sensors Using Silicon Fusion Bonding on EtoBox?
Ultra-stable, High-temperature Pressure Sensors Using Silicon Fusion Bonding by Kurt Petersen; Joe Brown; Ted Vermeulen; Phillip Barth; Joseph Mallon Jr.; Janusz Bryzek is a Engineering article available to read on EtoBox.
What is Ultra-stable, High-temperature Pressure Sensors Using Silicon Fusion Bonding about?
Rezorewstlve sdlcon-based pressure sensors have been fabncated which are capable of hlghpreclslon operation at temperatures as high as 250 "C These devices are fabncated by a umque &con fusion bonding process m which resistors from one wafer are bonded to the oxldlzed surface of a second wafer The mtermedlate oxide layer electncally isolates the resistors from each other, thereby provldmg the lugh-temperature capablhty Chip performance IS excellent, especzally hneanty and the stability of offset voltage and pressure sensitivity Introduehon
Who reads Ultra-stable, High-temperature Pressure Sensors Using Silicon Fusion Bonding?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kurt Petersen; Joe Brown; Ted Vermeulen; Phillip Barth; Joseph Mallon Jr.; Janusz Bryzek
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)
- Published
- 1990
- Language
- EN
- Field
- Engineering (Physical Sciences)