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MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China by Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.]; supported by, National Natural Science Foundation of China ... [et al.]; published by, SPIE--the International Society for Optical Engineering is a engineering available to read on EtoBox.

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Author
Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.]; supported by, National Natural Science Foundation of China ... [et al.]; published by, SPIE--the International Society for Optical Engineering
Publisher
Society of Photo-optical Instrumentation Engineers
Published
2002
Language
EN
ISBN
9780819447173
Category
engineering
Subjects
Engineering, Mathematics, Technology
Updated
2026-03-16

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Browse all works by Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.]; supported by, National Natural Science Foundation of China ... [et al.]; published by, SPIE--the International Society for Optical Engineering

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