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About this Engineering article
A novel hybrid patterning technique for micro and nanochannel fabrication by integrating hot embossing and inverse UV photolithography by Yin, Zhifu ;Cheng, E ;Zou, Helin is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yin, Zhifu ;Cheng, E ;Zou, Helin
- Publisher
- Royal Society of Chemistry; The Royal Society of Chemistry; Royal Society of Chemistry (RSC) (ISSN 1473-0197)
- Published
- 2014
- Language
- EN
- Field
- Engineering (Physical Sciences)