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Substrate Engineering Concepts to Mitigate Charge Collection in Deep Trench Isolation Technologies by Pellish, Jonathan A.; Reed, Robert A.; Schrimpf, Ronald D.; Alles, Michael L.; Varadharajaperumal, Muthubalan; Niu, Guofu; Sutton, Akil K.; Diestelhorst, Ryan M.; Espinel, Gustavo; Krithivasan, Ramkumar; Comeau, Jonathan P.; Cressler, John D.; Vizkelethy, Gyorgy; Marshall, Paul W.; Weller, Robert A.; Mendenhall, Marcus H.; Montes, Enrique J. is a Engineering article available to read on EtoBox.

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Author
Pellish, Jonathan A.; Reed, Robert A.; Schrimpf, Ronald D.; Alles, Michael L.; Varadharajaperumal, Muthubalan; Niu, Guofu; Sutton, Akil K.; Diestelhorst, Ryan M.; Espinel, Gustavo; Krithivasan, Ramkumar; Comeau, Jonathan P.; Cressler, John D.; Vizkelethy, Gyorgy; Marshall, Paul W.; Weller, Robert A.; Mendenhall, Marcus H.; Montes, Enrique J.
Publisher
IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9499)
Published
2006
Field
Engineering (Physical Sciences)

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