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About this Engineering article
Electromigration in Multilevel Interconnects with Polymeric Low-k Interlevel Dielectrics by Justison, P.; Ogawa, E.; Ho, P. S.; Gall, M.; Capasso, C.; Jawarani, D.; Wetzel, J.; Kawasaki, H. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Justison, P.; Ogawa, E.; Ho, P. S.; Gall, M.; Capasso, C.; Jawarani, D.; Wetzel, J.; Kawasaki, H.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2001
- Language
- EN
- Field
- Engineering (Physical Sciences)