About this scholarly article

1996 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD '96 (IEEE Cat. No.96TH8095) - Implementation of nitride oxidation in the 2D process simulator IMPACT-4 by Tixier, A.; Senez, V.; Baccus, B.; Marmiroli, A. is a scholarly article available to read on EtoBox.

Author

Tixier, A.; Senez, V.; Baccus, B.; Marmiroli, A.

Publisher

Japan Soc. Appl. Phys

Published

1996

Language

EN