Opening book details…
About this Engineering article
Ion fluxes and energies in inductively coupled radio-frequency discharges containing C2F6 andc-C4F8 by A. N. Goyette; Y. Wang; M. Misakian; J. K. Olthoff is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- A. N. Goyette; Y. Wang; M. Misakian; J. K. Olthoff
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2000
- Field
- Engineering (Physical Sciences)
More by A. N. Goyette; Y. Wang; M. Misakian; J. K. Olthoff
Browse all works by A. N. Goyette; Y. Wang; M. Misakian; J. K. Olthoff