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What is Mode Coupling Effects on MEMS Micromirrors about?

This study examines the influence of mode coupling on the vibration trajectories of MEMS micromirrors, which are critical for their operational performance. A comprehensive vibration trajectory model is developed, revealing that mode coupling causes deviations from the expected sinusoidal patterns, compromising trajectory prediction accuracy. To address these deviations, the authors propose optimizing structural parameters during the micromirror design process.

Author

rfar0028

Language

EN