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About this Physics and Astronomy article
Development of etch hillocks on different Si(h k l) planes in silicon anisotropic etching by I. Zubel; M. Kramkowska is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- I. Zubel; M. Kramkowska
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0039-6028)
- Published
- 2008
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)